Main performance parameters |
Crystal structure | Quartet |
Crystal growth method | Czochralski technology |
Lattice constant | a=3.756Å c=12.63 Å |
Melting point(℃) | 1650 |
Density | 5.92(g/cm3) |
Hardness | 6-6.5(mohs) |
dielectric coefficient | ε=16.8 |
Size | 10x3,10x5,10x10,15x15,,20x15,20x20, |
Ф15,Ф20,Ф1″,Ф2″,Ф2.6″ |
Thickness | 0.5mm,1.0mm |
Polishing | Single-sided or double-sided |
Crystal orientation | <001> |
Crystal plane orientation accuracy | ±0.5° |
Edge orientation accuracy | 2°(Special requirements can reach within 1°) |
Bevel wafer | According to specific requirements, wafers with edge-oriented crystal planes inclined at a specific angle (inclination angle 1°-45°) can be processed |
Ra: | ≤5Å(5µm×5µm) |
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Package | Class 100 clean bag, Class 1000 super clean room |