(La,Sr)(Al,Ta)O3

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Technical Parameter

The strontium lanthanum aluminate crystal has no twins and phase transitions from the melting point to the low temperature. It has the same structure as the high-temperature superconductor YBCO. Compared with other substrates, the <001> plane has a moderate lattice mismatch with YBCO<001>. (2.5~3.5%). At the same time, the thermal expansion coefficient of this crystal is lower than that of other perovskite crystals, which can deposit films at lower temperatures to improve lattice mismatch and reduce stress.

 

 

Main performance parameters

Crystal structure

Quartet

Crystal growth method

Czochralski technology

Lattice constant

a=3.756Å   c=12.63 Å

Melting point

1650

Density

5.92g/cm3

Hardness

6-6.5mohs

dielectric coefficient

ε=16.8

Size

 

10x310x510x1015x15,,20x1520x20

Ф15,Ф20Ф1″Ф2″,Ф2.6″

Thickness

0.5mm1.0mm

Polishing

Single-sided or double-sided

Crystal orientation

001  

Crystal plane orientation accuracy

±0.5°

Edge orientation accuracy

Special requirements can reach within 1°

Bevel wafer

According to specific requirements, wafers with edge-oriented crystal planes inclined at a specific angle (inclination angle 1°-45°) can be processed

Ra:

≤5Å5µm×5µm

 

 

Package

Class 100 clean bag, Class 1000 super clean room

 

 

 

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