Lithium aluminate single crystal has a very good lattice match to GaN, and thus becomes a potential III-V nitride film substrate material.
Main performance parameters |
Crystal structure | Quartet |
Lattice constant | a=5.17 A c=6.26 A |
Melting point(℃) | 1900 |
Density | 2.62(g/cm3) |
Hardness | 7.5(mohs) |
Mismatch rate with GaN <001> | 1.4% |
Size | 10x3,10x5,10x10,15x15,,20x15,20x20, |
Ф15,Ф20,Ф1″,Ф2″,Ф2.6″ | |
Thickness | 0.5mm,1.0mm |
Polishing | Single-sided or double-sided |
Crystal orientation | <100> <001> |
Crystal plane orientation accuracy | ±0.5° |
Edge orientation accuracy | 2°(Special requirements can reach within 1°) |
Bevel wafer | According to specific requirements, wafers with edge-oriented crystal planes inclined at a specific angle (inclination angle 1°-45°) can be processed |
Ra: | ≤5Å(5µm×5µm) |
Package | Class 100 clean bag, Class 1000 super clean room |